Recommended use of the relevant applicauons identfied functon 1. Rtv silicone rubbers each have their respective workability and storability characteristics, twocomponent and are divided into onecomponent and twocomponent types. Tetraethyl orthosilicate, ethyl silicate, tetraethoxysilane, ethyl orthosilicate, silicic acid tetraethyl ester. Teos is the ethyl ester of orthosilicic acid, sioh4. View indentification, hazards, safety information, toxicity, regulations. Tetraethyl orthosilicate cas 78104 800658 merck millipore. Tetraethyl orthosilicate wikimili, the best wikipedia reader. A registration number is not available for this substance as the substance. B i the material may be stowed on deck or under deck on a cargo vessel and on a. Silicon oxide sio2 nanopowder us research nanomaterials, inc. Online shopping for lab chemicals from a great selection of industrial supplies at everyday low prices. Chemical product and company identification manufacturer name.
Tetraethyl orthosilicate wikipedia republished wiki 2. Identification material name teos issue date 26june2014 revision date 27april2017 supersedes date 22april2015 other means of identification spec id 000000000322 cas number 78104 synonyms teos, ethyl silicate, tetraethyl silicate, tetraethyl orthosilicate, silicic acid, tetraethyl ester recommended use semiconductor manufacturing. Hydrogen burns with an almost invisible flame of relatively low thermal radiation. Effects of solvent on teos hydrolysis kinetics and silica. It is the most prevalent alkoxide of silicon contents. Estimates for silane loading on siliceous fillers average particle size amount of silane minimum of monolayer coverage 100 microns 0. Stability and reactivity chemical stability stable possibility of hazardous reactions will not occur. It is the most prevalent alkoxide of silicon teos is a tetrahedral molecule. Orthosilicic acid tetraethyl ester, teos, tetraethoxysilane. Can cause irritation to the mouth, throat and stomach. Details of the supplier of the safety data sheet emergency telephone number for information us call. Use chemical safety goggles andor a full face shield where splashing is possible. Deposition chemical selection guide deposition precursors intermetal dielectric precursors teos tetraethylorthosilicate 4ms tetramethylsilane omcts octamethylcyclotetrasiloxane cvd dopants teb triethylborate tepo triethylphosphate tmb trimethylborate tmp trimethylphosphite silicon oxide and nitride precursors bdeas bis diethylaminosilane.
The basic properties are similar to the more popular tetraethyl orthosilicate, which is usually preferred because the product of hydrolysis, ethanol, is less toxic than methanol tetramethyl orthosilicate hydrolyzes to sio 2. Teos is a stable, nonpyrophoric, noncorrosive liquid, and thereby is a preferable alternative to processes employing. Protective gloves, lab coat and safety glasses should be worn when handling this product. August 27, 2014 the dow chemical company page 3 of 7 metalworking fluids to neutralize acidic components in lubricants and prevent corrosion and rusting and for. Teos is the ethyl ester of orthosilicic acid, sioh 4. Tetraethyl orthosilicate teos is an inorganic material that can be used as a precursor for silicabased materials. Reason for citation ethyl silicate is on the hazardous substance list because it is regulated by osha and cited by acgih, dot, niosh and nfpa. It is also used in chemicalresistant paints, lacquers, and protective coatings. Irritating to the eyes, skin, respiratory system and muscous membranes. Chemicalresistant, impervious gloves complying with an approved standard should be worn at all times when handling chemical products if a risk assessment indicates this is necessary. Tetraethoxysilane, 98% safety data sheet 08312015 en english us sds id. Dimethyldiethoxysilane, 98% safety data sheet sid4121. Appropriate techniques should be used to remove potentially contaminated clothing. August 27, 2014 the dow chemical company page 3 of 7 metalworking fluids to neutralize acidic components in lubricants and prevent corrosion and rusting and for proprietary corrosion inhibitors and biocides.
Download msds pdf search msds currently available for download bioworld offers tetraethyl orthosilicate for your research at low price. Water, carbon dioxide, dry chemical electrical classification. Inorganic flammable gas health hazard data time weighted average exposure limit. Chemtrec 8004249300 outside usa 7035273887 regulatory information msds revision history. Identification of the substancemixture and of the companyundertaking. Considering the parameters specified by the glove manufacturer, check during use that the gloves are still retaining their protective properties. Dynamic light scattering was employed to monitor simultaneous changes in the average diameter of silica particles and atomic.
Tetraethoxysilane recommended use laboratory chemicals. Tetramethyl orthosilicate is the chemical compound with the formula sioch 3 4. Teos is a stable, nonpyrophoric, noncorrosive liquid, and. Specialty chemicals and engineered materials ultrapur teos. Maintain eye wash fountain and quickdrench facilities in work area. The company operates in more than 30 countries and delivers an extensive portfolio of products and services. As our channel brand, vwr offers an integrated, seamless purchasing experience that is optimized for the way our. Ingredients found on one of the osha designated carcinogen lists are listed below. View product specific information, msds, references and buying faq. These products are used for corrosionresistant coatings, zincrich primers, precision investment castings, industrial chemicals and electronic appicl ations. Safety data sheet rochester institute of technology. Excellent chemical resistance high adhesion strength to various materials availability for multi layer. Aldrich o7805 page 1 of 7 sigmaaldrich material safety data sheet version 3.
Many markets today there are myriads of possibilities for benefiting from the use of dynasylan. It can also be used in the synthesis of blended membranes. Identification material name teos issue date 26june2014 revision date 27april2017 supersedes date 22april2015 other means of identification spec id 000000000322 cas number 78104 synonyms teos, ethyl silicate, tetraethyl silicate, tetraethyl orthosilicate, silicic acid, tetraethyl ester recommended use semiconductor. Wash hands, forearms and face thoroughly after handling chemical products, before eating, smoking and using the lavatory and at the end of the working period. Ultrapur teos is a liquid precursor used in cvd process. If applicable, use process enclosures, local exhaust ventilation, or other engineering controls to maintain airborne levels below recommended exposure limits. Tetraethyl orthosilicate teos, titanium isopropoxide ttip and zirconium propoxide zrpro 4, aluminum secbutoxide alsb were used as silica, titania, zirconia and alumina sources, respectively. Cetyltrimethylammonium bromide ctab columbus chemical. Dimethyldiethoxysilane, 98% safety data sheet 01062015 en english us sds id. Silicon nitride has many applica ons in device fabrica on because of its superior barrier proper es and oxida on resistance. Tetraethyl orthosilicate, formally named tetraethoxysilane and abbreviated teos, is the chemical compound with the formula sioc2h54.
Praxair material safety data sheet middlesex welding home. Safety data sheet northwest missouri state university. Chemical name and synonyms tetraethyl orthosilicate teos dot hazard class division 3 issue date and revisions revised november 2001 formula teos health hazard data emergency overview teos is a clear, colorless liquid. Tetraethyl orthosilicate an overview sciencedirect topics. Application teos is majorly used as a silicon source in the synthesis of silicon oxide which can be further used in a variety of optoelectronics based applications. Prolonged exposure may affect kidney, liver and respiratory tract nose, throat and lungs.
Tetraethyl orthosilicate, formally named tetraethoxysilane and abbreviated teos, is the chemical compound with the formula sioc 2 h 5 4. Nessler reagent material safety data sheet integra chemical company 1216 6th ave n kent wa 98032 phone. Insitu liquidstate 29si nuclear magnetic resonance was used to investigate the temporal concentration changes during ammoniacatalyzed initial hydrolysis of tetraethyl orthosilicate in different solvents methanol, ethanol, npropanol, isopropanol and nbutanol. Revised on 07032012 page 3 of 6 methods and materials for containment and cleaning up pick up and arrange disposal without creating dust. Ammonium hydroxide, acs safety data sheet according to federal register vol. Aldrich 333859 page1 of 8 sigmaaldrich safety data sheet version 4. Safety data sheet sds thoroughly for safety and toxicological data as well as for. Chemical resistant, impervious gloves complying with an approved standard should be worn at all times when handling chemical products if a risk assessment indicates this is necessary. Laboratorygrade denatured ethyl alcohol, 95%, 1l 33. Safety data sheet according to 29cfr19101200 and ghs rev. Uses advised against food, drug, pesticide or biocidal product use. Specialty chemicals and engineered materials ultrapur teos tetraethylorthosilicate tetraethylorthosilicate teos is a liquid source material used in cvd systems for deposition of doped and undoped silicon dioxide films. Chemical product and company identification product name.
Cetyltrimethylammonium bromide ctab and the triblock copolymer surfactants pluronic p104, p123, f127 were used as surfactants. Xizhou, qufu, shandong, china for more information call. This molecule consists of four methoxy groups bonded to a silicon atom. Conditions to avoid not available incompatible materials strong oxidizing agents hazardous decomposition products carbon. Form no 23300267 triethanolamine tea dow chemical company. Evonik resource efficiency gmbh product information dynasylan teos uhp dec 2018 page 12. Ultrapur teos is a liquid source material used in cvd systems for deposition of doped and undoped dioxide films. Sigmaaldrich offers a number of tetraethyl orthosilicate products. Download msdsmaterial safety data sheet of tetraethyl orthosilicate.
1489 1115 1142 835 1404 1170 518 373 955 973 1328 467 1160 818 1528 1184 998 1569 583 883 312 1581 53 573 1091 1152 29 1391 674 931 386